Introduction to Focused Ion Beam Nanometrology (Iop Concise Physics) (Hardcover)
***Books listed on this website are available as new books. For information about used, sale, and other in-store items please call or email us.***
This book describes modern focused ion beam microscopes and techniques and how they can be used to aid materials metrology and as tools for the fabrication of devices that in turn are used in many other aspects of fundamental metrology.